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YONEYAMA Satoru
Department Aoyama Gakuin University Department of Mechanical Engineering, College of Science and Engineering Position Professor |
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| Language | English |
| Publication Date | 2021/08 |
| Type | Academic Journal |
| Peer Review | Peer reviewed |
| Title | "Estimating Stresses Generated in Silicon Wafer from Measured Deflection Distribution" |
| Contribution Type | Collaboration |
| Journal | Advanced Experimental Mechanics |
| Journal Type | Japan |
| Publisher | Japanese Society for Experimental Mechanics |
| Volume, Issue, Page | 6,pp.33-38 |
| Author and coauthor | N. Toyama, Y. Zhang, S. Yoneyama, S. Kuwabara and H. Takano |