|
YONEYAMA Satoru
Department Aoyama Gakuin University Department of Mechanical Engineering, College of Science and Engineering Position Professor |
|
| Language | English |
| Publication Date | 2022/01 |
| Type | Academic Journal |
| Peer Review | Peer reviewed |
| Invitation | Invited paper |
| Title | "Estimating Residual Stresses of Silicon Wafer from Measured Full-field Deflection Distribution" |
| Contribution Type | Collaboration |
| Journal | Optics and Lasers in Engineering |
| Journal Type | Another Country |
| Publisher | Elsevier |
| Volume, Issue, Page | 148,pp.106781 |
| Author and coauthor | Y. Obata, K. Sekino, K. Takeo and S. Yoneyama |