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ISHIKAWA Yasuaki
Department Aoyama Gakuin University Department of Electrical Engineering and Electronics, College of Science and Engineering Position Professor |
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| Language | English |
| Publication Date | 2019/02 |
| Type | Academic Journal |
| Peer Review | Peer reviewed |
| Title | The optical properties of silicon-rich-silion nitride prepared by plasma-enhanced chemical vapor deposition |
| Contribution Type | Collaboration |
| Journal | Mater. Sci. Semicon. Proces. |
| Journal Type | Another Country |
| Volume, Issue, Page | 90,pp.54-58 |
| Author and coauthor | Seiya Yoshinaga, Yasuaki Ishikawa, Yusuke Kawamura, Yuya Nakai, and Yukiharu Uraoka |
| DOI | 10.1016/j.mssp.2018.09.029 |