ISHIKAWA Yasuaki
Department Aoyama Gakuin University Department of Electrical Engineering and Electronics, College of Science and Engineering Position Professor |
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Language | English |
Publication Date | 2019/03 |
Type | Academic Journal |
Peer Review | Peer reviewed |
Title | Physical and electrical properties of ALD-Al2O3/GaN MOS capacitor annealed with high pressure water vapor |
Contribution Type | Collaboration |
Journal | Jpn. J. Appl. Phys. |
Journal Type | Another Country |
Volume, Issue, Page | 58,pp.040902-1-6 |
Author and coauthor | Yuta Fujimoto, Mutsunori Uenuma, Tsubasa Nakamura, Masaaki Furukawa, Yasuaki Ishikawa, and Yukiharu Uraoka |
DOI | 10.7567/1347-4065/ab09a2 |