ISHIKAWA Yasuaki
Department Aoyama Gakuin University Department of Electrical Engineering and Electronics, College of Science and Engineering Position Professor |
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Language | English |
Publication Date | 2019/05 |
Type | Academic Journal |
Peer Review | Peer reviewed |
Title | Removing Process of the Three-Dimension Periodic Nanostructure Fabricated from KMPR Photoresist |
Contribution Type | Collaboration |
Journal | Jpn. J. Appl. Phys. |
Journal Type | Another Country |
Volume, Issue, Page | 58,pp.SDDF08-1-7 |
Author and coauthor | Xudongfang Wang, Yasuaki Ishikawa, Shinji Araki, Mutsunori Uenuma, and Yukiharu Uraoka |
DOI | 10.7567/1347-4065/ab0dea |