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ISHIKAWA Yasuaki
Department Aoyama Gakuin University Department of Electrical Engineering and Electronics, College of Science and Engineering Position Professor |
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| Language | English |
| Publication Date | 2003/11 |
| Type | Academic Journal |
| Peer Review | Peer reviewed |
| Title | Nucleation Control by Intermittent Supply of Dichlorosilane towards the Fabrication of Polycrystalline Silicon Thin Films with Large Grain Size |
| Contribution Type | Collaboration |
| Journal | Jpn. J. Appl. Phys. |
| Journal Type | Another Country |
| Volume, Issue, Page | 42,pp.6759-6765 |
| Author and coauthor | Yasuaki Ishikawa, Yukiharu Uraoka and Takashi Fuyuki |
| DOI | 10.1143/JJAP.42.6759 |