ISHIKAWA Yasuaki
Department Aoyama Gakuin University Department of Electrical Engineering and Electronics, College of Science and Engineering Position Professor |
|
Language | English |
Publication Date | 2013/09 |
Type | Academic Journal |
Peer Review | Peer reviewed |
Title | Characterization of Al2O3 gate dielectric deposited on n-GaN by plasma-assisted atomic layer deposition |
Contribution Type | Collaboration |
Journal | Physica Status Solidi C |
Journal Type | Another Country |
Volume, Issue, Page | 10,pp.1426-1429 |
Author and coauthor | Koji Yoshitsugu, Masahiro Horita, Yasuaki Ishikawa, and Yukiharu Uraoka |
DOI | 10.1002/pssc.201300273 |