ISHIKAWA Yasuaki
Department Aoyama Gakuin University Department of Electrical Engineering and Electronics, College of Science and Engineering Position Professor |
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Language | English |
Publication Date | 2018/05 |
Type | Academic Journal |
Peer Review | Peer reviewed |
Title | Dimethylaluminum hydride for atomic layer deposition of Al2O3 passivation of amorphous InGaZnO thin-film transistors |
Contribution Type | Collaboration |
Journal | Appl. Phys. Express |
Journal Type | Another Country |
Volume, Issue, Page | 11,pp.061103-1-5 |
Author and coauthor | Dianne C. Corsino, Juan Paolo S. Bermundo, Mami N. Fujii, Kiyoshi Takahashi, Yasuaki Ishikawa, and Yukiharu Uraoka |
DOI | 10.7567/APEX.11.061103 |