YONEYAMA Satoru
Department Aoyama Gakuin University Department of Mechanical Engineering, College of Science and Engineering Position Professor |
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Language | English |
Publication Date | 2021/08 |
Type | Academic Journal |
Peer Review | Peer reviewed |
Title | "Estimating Stresses Generated in Silicon Wafer from Measured Deflection Distribution" |
Contribution Type | Collaboration |
Journal | Advanced Experimental Mechanics |
Journal Type | Japan |
Publisher | Japanese Society for Experimental Mechanics |
Volume, Issue, Page | 6,pp.33-38 |
Author and coauthor | N. Toyama, Y. Zhang, S. Yoneyama, S. Kuwabara and H. Takano |