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YONEYAMA Satoru
Department Aoyama Gakuin University Department of Mechanical Engineering, College of Science and Engineering Position Professor |
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| 言語種別 | 英語 |
| 発行・発表の年月 | 2021/08 |
| 形態種別 | 学術雑誌 |
| 査読 | 査読あり |
| 標題 | "Estimating Stresses Generated in Silicon Wafer from Measured Deflection Distribution" |
| 執筆形態 | 共同 |
| 掲載誌名 | Advanced Experimental Mechanics |
| 掲載区分 | 国内 |
| 出版社・発行元 | Japanese Society for Experimental Mechanics |
| 巻・号・頁 | 6,pp.33-38 |
| 著者・共著者 | N. Toyama, Y. Zhang, S. Yoneyama, S. Kuwabara and H. Takano |