YONEYAMA Satoru
Department Aoyama Gakuin University Department of Mechanical Engineering, College of Science and Engineering Position Professor |
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Language | English |
Publication Date | 2022/01 |
Type | Academic Journal |
Peer Review | Peer reviewed |
Invitation | Invited paper |
Title | "Estimating Residual Stresses of Silicon Wafer from Measured Full-field Deflection Distribution" |
Contribution Type | Collaboration |
Journal | Optics and Lasers in Engineering |
Journal Type | Another Country |
Publisher | Elsevier |
Volume, Issue, Page | 148,pp.106781 |
Author and coauthor | Y. Obata, K. Sekino, K. Takeo and S. Yoneyama |